Zero Liquid Discharge for Chip Manufacturing Wastewater
【Project Overview】
In chip manufacturing, processes such as wafer cleaning, etching, and deposition extensively use chlorine-containing chemicals (e.g., hydrochloric acid, ammonium chloride), generating high-salinity wastewater dominated by chloride salts. This wastewater is characterized not only by high salt content (chloride concentration typically 5-8%) but also by heavy metal ions (e.g., copper, nickel), organic pollutants (e.g., photoresist residues), and trace fluorides, ranking its treatment difficulty among the highest for industrial effluents. Traditional wastewater treatment processes struggle to meet the dual demands of "zero liquid discharge" and "resource recovery." This Create project has established a new paradigm for industrial wastewater treatment by implementing a comprehensive "Pretreatment + Electrodialysis Concentration + MVR Crystallization" process, achieving a remarkable chloride salt concentration of 16%.

【Project Highlights】
- Integrated Full-Process Design Ensures Stable Compliance & Salt Crystallization
The project employs a complete "Pretreatment + MVR Crystallization" process route, successfully establishing an end-to-end system from wastewater pretreatment and deep concentration to final resource-oriented crystallization. This not only guarantees stable compliance of the final effluent but also achieves the separation of mixed salts via solid crystallization, providing a reliable terminal solution for the thorough treatment and resource recovery of electronics wastewater.
- High-Fold Concentration Technology Significantly Reduces End-of-Pipe Disposal Costs
Targeting the chloride salt-dominated electronics wastewater, the project successfully achieved a concentration of 16% (160 g/L). This high-fold concentration effect drastically reduces the wastewater volume entering the energy-intensive MVR evaporation-crystallization system, directly lowering both the capital investment and operating costs for this final unit, making the ZLD solution economically more viable.
- Precise Pretreatment Process Safeguards Core System Stability
Given the complex composition of electronics wastewater, including impurities like heavy metals, the project's specialized pretreatment system effectively removes components harmful to subsequent membrane concentration and MVR units. This protects the core process stages from contamination and scaling, ensuring long-term, stable, and efficient operation of the entire.
- Wastewater Resource Recovery: A Win-Win for Environmental and Economic Value
The process ultimately obtains solid mixed salts via MVR crystallization. Although categorized as mixed salts, this achieves solidification and reduction of pollutants, laying the groundwork for subsequent conditional resource utilization or compliant disposal. The entire transforms electronics wastewater from an environmental liability into a potential resource, unifying environmental benefits with cost control.